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              Z512, Z522 Digital / Analog
              Mass Flow Controller / Meter
              SEC-Z512MGX SEC-Z522MGXN SEC-Z522MGX
              SEC-Z512X SEC-Z522XN SEC-Z522X
              SEF-Z512MGX SEF-Z522MGXN SEF-Z522MGX
              SEF-Z512X SEF-Z522XN SEF-Z522X
              Full-scale flow rate MR/MG number
              (N2 conversion flow rate) #R01:10SCCM
              Valve Type
              Flow rate at fully closed control valve
              Flow rate control range
              Flow rate measuring range (SEF)
              Operating temperature
              50 to 300 kPa (d)
              #5.5, #06: 100 to 300 kPa (d)
              Operating differential pressure (SEF)
              MAX. Operating pressure
              Pressure resistance
              Leak Integrity
              Flow rate setting signal
              Flow rate output signal
              Wetted materials
              1/4 inch VCR equivalent
              Option: 1.125 inch IGS
              Mounting orientation
              *1 The gas type and full scale settings for the SEC(SEF)-Z512MGX, Z522MGX, and Z522MGXN can be changed
              by the operator, using special software.
              *2 The flow rate precision guaranteed temperatures conform to SEMI E56-1296 standards. The precision is that
              associated with the full-scale MR and MG number values.
              *3 IGS: Integrated Gas System
              * SCCM and SLM are notations indicating the gas flow rate (mL/min, L/min, at 0°C and 101.3 kPa).
              Mass flow controller model *1 SEC-Z512KX
              Mass flow meter model *1 SEF-Z512KX
              O: Normally open C: Normally closed
              ≤ 2% F.S.
              2-100% of F.S.
              MR/MG number
              #6.5: 22SLM
              #07: 30SLM
              #08: 50SLM
              0-100% of F.S.
              Accuracy *2 ±1.0%F.S. ±1.0%S.P.(Flow rate>25%F.S.)
              ±0.25%F.S.(Flow rate≤25%F.S.)
              5 to 50°C (recommended temperature range: 15 to 45°C)
              ≤ 1 second: Over full flow rate range
              ≤ ±0.5% F.S.
              ≤ ±0.2% F.S.
              Operating differential pressure 50 to 300 kPa (d) 200 to 300 kPa (d)
              ≤ 300 kPa (d)
              450 kPa (g)
              1000 kPa (g)
              ≤ 5 x 10-12 Pa·m3/s (He)
              0.1 to 5 V DC (2% to F.S.); Input impedance 1 MÙ or higher
              0 to 5 V DC (0% to F.S.); Minimum load resistance 2 kÙ or higher
              Digital interface
              With address function: RS-485 (transmission speed 38,400 bps)
              F-Net Protocol
              316L Stainless Steel (polished surface)
              Power supply
              +15V±5% 150mA
              -15V±5% 150mA
              Signal response
              Analog: D-Sub 9-pin (TOP)
              Digital: 2 LAN jacks (TOP)
              Standard Fitting *3
              1/4 inch VCR equivalent
              Option: 1.125 inch IGS, 1.5 inch IGS
              1.5 inch IGS
              Z512/522 Web Ver.001
              Subject to change without notice.

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