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               Z512, Z522 Digital / Analog

                Mass Flow Controller / Meter

                SEC-Z512MGX SEC-Z522MGXN SEC-Z522MGX

                SEC-Z512X SEC-Z522XN SEC-Z522X

                SEF-Z512MGX SEF-Z522MGXN SEF-Z522MGX

                SEF-Z512X SEF-Z522XN SEF-Z522X

                Full-scale flow rate MR/MG number

                (N2 conversion flow rate) #R01:10SCCM













                Valve Type

                Flow rate at fully closed control valve

                Flow rate control range

                Flow rate measuring range (SEF)

                Operating temperature




                50 to 300 kPa (d)

                #5.5, #06: 100 to 300 kPa (d)

                Operating differential pressure (SEF)

                MAX. Operating pressure

                Pressure resistance

                Leak Integrity

                Flow rate setting signal

                Flow rate output signal

                Wetted materials

                1/4 inch VCR equivalent

                Option: 1.125 inch IGS

                Mounting orientation

                *1 The gas type and full scale settings for the SEC(SEF)-Z512MGX, Z522MGX, and Z522MGXN can be changed

                by the operator, using special software.

                *2 The flow rate precision guaranteed temperatures conform to SEMI E56-1296 standards. The precision is that

                associated with the full-scale MR and MG number values.

                *3 IGS: Integrated Gas System

                * SCCM and SLM are notations indicating the gas flow rate (mL/min, L/min, at 0°C and 101.3 kPa).

                Mass flow controller model *1 SEC-Z512KX

                Mass flow meter model *1 SEF-Z512KX

                O: Normally open C: Normally closed

                ≤ 2% F.S.

                2-100% of F.S.


                MR/MG number

                #6.5: 22SLM

                #07: 30SLM

                #08: 50SLM

                0-100% of F.S.

                Accuracy *2 ±1.0%F.S. ±1.0%S.P.(Flow rate>25%F.S.)

                ±0.25%F.S.(Flow rate≤25%F.S.)

                5 to 50°C (recommended temperature range: 15 to 45°C)

                ≤ 1 second: Over full flow rate range

                ≤ ±0.5% F.S.

                ≤ ±0.2% F.S.

                Operating differential pressure 50 to 300 kPa (d) 200 to 300 kPa (d)

                ≤ 300 kPa (d)

                450 kPa (g)

                1000 kPa (g)

                ≤ 5 x 10-12 Pa·m3/s (He)

                0.1 to 5 V DC (2% to F.S.); Input impedance 1 Mù or higher

                0 to 5 V DC (0% to F.S.); Minimum load resistance 2 kù or higher

                Digital interface

                With address function: RS-485 (transmission speed 38,400 bps)

                F-Net Protocol

                316L Stainless Steel (polished surface)

                Power supply

                +15V±5% 150mA

                -15V±5% 150mA

                Signal response

                Analog: D-Sub 9-pin (TOP)

                Digital: 2 LAN jacks (TOP)

                Standard Fitting *3

                1/4 inch VCR equivalent

                Option: 1.125 inch IGS, 1.5 inch IGS

                1.5 inch IGS


                Z512/522 Web Ver.001

                Subject to change without notice.

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